Measurement of nanomechanical resonant structures in single-crystal silicon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3821-3824

  Carr, D W ^a   Sekaric, L ^a   Craighead, H G ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744365184     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590416     Document Type: Article

References (11)

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