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Volumn 57, Issue 4, 2010, Pages 866-876

The high-mobility bended n-channel silicon nanowire transistor

Author keywords

Micro Raman spectroscopy; Mobility; Multiple gate MOSFET; Silicon nanowire; Strained Si

Indexed keywords

DEVICE CHARACTERISTICS; DEVICE GATE; DEVICE PERFORMANCE; ELECTRICAL FIELD; GATE BIAS; GATE STACKS; GATE-ALL-AROUND; HIGH MOBILITY; LOW FIELD MOBILITY; LOW TEMPERATURES; MICRO RAMAN SPECTROSCOPY; MULTIPLE-GATE MOSFET; N-CHANNEL; NMOSFETS; POLYSILICON GATES; ROOM TEMPERATURE; SILICON NANOWIRE TRANSISTORS; SILICON NANOWIRES; STRAIN PROFILES; STRAINED-SI; TRANSISTOR OPERATION;

EID: 77950297191     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2010.2040939     Document Type: Article
Times cited : (41)

References (40)
  • 1
    • 34548335211 scopus 로고    scopus 로고
    • Low-temperature in situ large-strain plasticity of silicon nanowires
    • Aug.
    • X. Han, K. Zheng, Y. F. Zhang, X. N. Zhang, Z. Zhang, and Z. L. Wang, "Low-temperature in situ large-strain plasticity of silicon nanowires," Adv. Mater., vol.19, no.16, pp. 2112-2118, Aug. 2007.
    • (2007) Adv. Mater. , vol.19 , Issue.16 , pp. 2112-2118
    • Han, X.1    Zheng, K.2    Zhang, Y.F.3    Zhang, X.N.4    Zhang, Z.5    Wang, Z.L.6
  • 2
    • 34248208452 scopus 로고    scopus 로고
    • Giant piezoresistance effect in silicon nanowires
    • Oct.
    • R. He and P. Yang, "Giant piezoresistance effect in silicon nanowires," Nat. Nanotechnol., vol.1, no.1, pp. 42-46, Oct. 2006.
    • (2006) Nat. Nanotechnol. , vol.1 , Issue.1 , pp. 42-46
    • He, R.1    Yang, P.2
  • 3
    • 33846823034 scopus 로고    scopus 로고
    • Technology and metrology of new electronic materials and devices
    • Jan.
    • E. M. Vogel, "Technology and metrology of new electronic materials and devices," Nat. Nanotechnol., vol.2, no.1, pp. 25-32, Jan. 2007.
    • (2007) Nat. Nanotechnol. , vol.2 , Issue.1 , pp. 25-32
    • Vogel, E.M.1
  • 6
    • 58149234148 scopus 로고    scopus 로고
    • Fabrication and characterization of gate-all-around silicon nanowires on bulk silicon
    • Nov.
    • V. Pott, K. E. Moselund, D. Bouvet, L. De Michielis, and A. M. Ionescu, "Fabrication and characterization of gate-all-around silicon nanowires on bulk silicon," IEEE Trans. Nanotechnol., vol.7, no.6, pp. 733-744, Nov. 2008.
    • (2008) IEEE Trans. Nanotechnol. , vol.7 , Issue.6 , pp. 733-744
    • Pott, V.1    Moselund, K.E.2    Bouvet, D.3    De Michielis, L.4    Ionescu, A.M.5
  • 7
    • 36248941182 scopus 로고    scopus 로고
    • Strain-induced transconductance enhancement by pattern dependent oxidation in silicon nanowire field effect transistors
    • Nov.
    • A. Seike, T. Tange, Y. Sugiura, I. Tsuchida, H. Ohta, T. Watanabe, D. Kosemura, A. Ogura, and I. Ohdomari, "Strain-induced transconductance enhancement by pattern dependent oxidation in silicon nanowire field effect transistors," Appl. Phys. Lett., vol.91, no.20, p. 202 117, Nov. 2007.
    • (2007) Appl. Phys. Lett. , vol.91 , Issue.20 , pp. 202
    • Seike, A.1    Tange, T.2    Sugiura, Y.3    Tsuchida, I.4    Ohta, H.5    Watanabe, T.6    Kosemura, D.7    Ogura, A.8    Ohdomari, I.9
  • 8
    • 9644290791 scopus 로고    scopus 로고
    • High inversion current in silicon nanowire field effect transistors
    • Nov.
    • S.-M. Koo, A. Fujiwara, J.-P. Han, E. M. Vogel, C. A. Richter, and J. E. Bonevich, "High inversion current in silicon nanowire field effect transistors," Nano Lett., vol.4, no.11, pp. 2197-2201, Nov. 2004.
    • (2004) Nano Lett. , vol.4 , Issue.11 , pp. 2197-2201
    • Koo, S.-M.1    Fujiwara, A.2    Han, J.-P.3    Vogel, E.M.4    Richter, C.A.5    Bonevich, J.E.6
  • 10
    • 67349206622 scopus 로고    scopus 로고
    • Investigation of oxidation-induced strain in a top-down Si nanowire platform
    • Jul.-Sep.
    • M. Najmzadeh, D. Bouvet, P. Dobrosz, S. Olsen, and A. M. Ionescu, "Investigation of oxidation-induced strain in a top-down Si nanowire platform," Microelectron. Eng., vol.86, no.7-9, pp. 1961-1964, Jul.-Sep. 2009.
    • (2009) Microelectron. Eng. , vol.86 , Issue.7-9 , pp. 1961-1964
    • Najmzadeh, M.1    Bouvet, D.2    Dobrosz, P.3    Olsen, S.4    Ionescu, A.M.5
  • 11
    • 76949084924 scopus 로고    scopus 로고
    • Silicon nanowires with lateral uniaxial tensile stress profiles for high electron mobility gate-all-around MOSFETs
    • 10.1016/j.mee.2009.11.024, to be published
    • M. Najmzadeh, L. De Michielis, D. Bouvet, P. Dobrosz, S. Olsen, and A. M. Ionescu, "Silicon nanowires with lateral uniaxial tensile stress profiles for high electron mobility gate-all-around MOSFETs," Microelectron. Eng., 2010. 10.1016/j.mee.2009.11.024, to be published.
    • (2010) Microelectron. Eng.
    • Najmzadeh, M.1    De Michielis, L.2    Bouvet, D.3    Dobrosz, P.4    Olsen, S.5    Ionescu, A.M.6
  • 16
    • 33646090139 scopus 로고    scopus 로고
    • Fundamentals of silicon material properties for successful exploitation of strain engineering in modern CMOS manufacturing
    • May
    • P. R. Chidambaram, C. Bowen, S. Chakravarthi, C.Machala, and R.Wise, "Fundamentals of silicon material properties for successful exploitation of strain engineering in modern CMOS manufacturing," IEEE Trans. Electron Devices, vol.53, no.5, pp. 944-964, May 2006.
    • (2006) IEEE Trans. Electron Devices , vol.53 , Issue.5 , pp. 944-964
    • Chidambaram, P.R.1    Bowen, C.2    Chakravarthi, S.3    Machala, C.4    Wise, R.5
  • 17
    • 19044393023 scopus 로고    scopus 로고
    • Experimental study of biaxial and uniaxial strain effects on carrier mobility in bulk and ultrathin-body SOI MOSFETs
    • K. Uchida, R. Zednik, C.-H. Lu, H. Jagannathan, J.McVittie, P. McIntyre, and Y. Nishi, "Experimental study of biaxial and uniaxial strain effects on carrier mobility in bulk and ultrathin-body SOI MOSFETs," in IEDM Tech. Dig., 2004, pp. 229-232.
    • (2004) IEDM Tech. Dig. , pp. 229-232
    • Uchida, K.1    Zednik, R.2    Lu, C.-H.3    Jagannathan, H.4    Mcvittie, J.5    McIntyre, P.6    Nishi, Y.7
  • 18
    • 19044392028 scopus 로고    scopus 로고
    • Enhancement of electron mobility in ultrathin-body silicon-on-insulator MOSFETs with uniaxial strain
    • May
    • I. Lauer and D. A. Antoniadis, "Enhancement of electron mobility in ultrathin-body silicon-on-insulator MOSFETs with uniaxial strain," IEEE Electron Device Lett., vol.26, no.5, pp. 314-316, May 2005.
    • (2005) IEEE Electron Device Lett. , vol.26 , Issue.5 , pp. 314-316
    • Lauer, I.1    Antoniadis, D.A.2
  • 21
    • 50249175910 scopus 로고    scopus 로고
    • Experimental investigation on superior PMOS performance of uniaxial strained (110) silicon nanowire channel by embedded SiGe source/drain
    • M. Li, K. H. Yeo, Y. Y. Yeoh, S. D. Suk, K. H. Cho, D.-W. Kim, D. Park, and W.-S. Lee, "Experimental investigation on superior PMOS performance of uniaxial strained (110) silicon nanowire channel by embedded SiGe source/drain," in IEDM Tech. Dig., 2007, pp. 899-902.
    • (2007) IEDM Tech. Dig. , pp. 899-902
    • Li, M.1    Yeo, K.H.2    Yeoh, Y.Y.3    Suk, S.D.4    Cho, K.H.5    Kim, D.-W.6    Park, D.7    Lee, W.-S.8
  • 22
    • 39749091276 scopus 로고    scopus 로고
    • Device design and electron transport properties of uniaxially strained-SOI tri-gate nMOSFETs
    • Feb.
    • T. Irisawa, "Device design and electron transport properties of uniaxially strained-SOI tri-gate nMOSFETs," IEEE Trans. Electron Devices, vol.55, no.2, pp. 649-654, Feb. 2008.
    • (2008) IEEE Trans. Electron Devices , vol.55 , Issue.2 , pp. 649-654
    • Irisawa, T.1
  • 23
    • 44949254989 scopus 로고    scopus 로고
    • Silicon nanowires feel the pinch
    • Jun.
    • A. C. H. Rowe, "Silicon nanowires feel the pinch," Nat. Nanotechnol., vol.3, no.6, pp. 311-312, Jun. 2008.
    • (2008) Nat. Nanotechnol. , vol.3 , Issue.6 , pp. 311-312
    • Rowe, A.C.H.1
  • 24
    • 33847697736 scopus 로고    scopus 로고
    • Physical mechanisms of electron mobility enhancement in uniaxial stressed MOSFETs and impact of uniaxial stress engineering in ballistic regime
    • K. Uchida, T. Krishnamohan, K. C. Saraswat, and Y. Nishi, "Physical mechanisms of electron mobility enhancement in uniaxial stressed MOSFETs and impact of uniaxial stress engineering in ballistic regime," in IEDM Tech. Dig., 2005, pp. 129-132.
    • (2005) IEDM Tech. Dig. , pp. 129-132
    • Uchida, K.1    Krishnamohan, T.2    Saraswat, K.C.3    Nishi, Y.4
  • 25
    • 50249165347 scopus 로고    scopus 로고
    • Examination of additive mobility enhancements for uniaxial stress combined with biaxially strained Si, biaxially strained SiGe and Ge channel MOSFETs
    • O. Weber, T. Irisawa, T. Numata, M. Harada, N. Taoka, Y. Yamashita, T. Yamamoto, N. Sugiyama, M. Takenaka, and S. Takagi, "Examination of additive mobility enhancements for uniaxial stress combined with biaxially strained Si, biaxially strained SiGe and Ge channel MOSFETs," in IEDM Tech. Dig., 2007, pp. 719-722.
    • (2007) IEDM Tech. Dig. , pp. 719-722
    • Weber, O.1    Irisawa, T.2    Numata, T.3    Harada, M.4    Taoka, N.5    Yamashita, Y.6    Yamamoto, T.7    Sugiyama, N.8    Takenaka, M.9    Takagi, S.10
  • 26
    • 0000699182 scopus 로고
    • Piezo-Raman measurements and anharmonic parameters in silicon and diamond
    • Apr.
    • E. Anastassakis, A. Cantarero, and M. Cardona, "Piezo-Raman measurements and anharmonic parameters in silicon and diamond," Phys. Rev. B, Condens. Matter, vol.41, no.11, pp. 7529-7535, Apr. 1990.
    • (1990) Phys. Rev. B, Condens. Matter , vol.41 , Issue.11 , pp. 7529-7535
    • Anastassakis, E.1    Cantarero, A.2    Cardona, M.3
  • 27
    • 28844471635 scopus 로고    scopus 로고
    • The use of Raman spectroscopy to identify strain and strain relaxation in strained Si/SiGe structures
    • Nov.
    • P. Dobrosz, S. J. Bull, S. H. Olsen, and A. G. O'Neill, "The use of Raman spectroscopy to identify strain and strain relaxation in strained Si/SiGe structures," Surf. Coat. Technol., vol. 200, no. 5/6, pp. 1755-1760, Nov. 2005.
    • (2005) Surf. Coat. Technol. , vol.200 , Issue.5-6 , pp. 1755-1760
    • Dobrosz, P.1    Bull, S.J.2    Olsen, S.H.3    O'Neill, A.G.4
  • 28
    • 0030081591 scopus 로고    scopus 로고
    • Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits
    • Feb.
    • I. De Wolf, "Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits," Semicond. Sci. Technol., vol.11, no.2, pp. 139-154, Feb. 1996.
    • (1996) Semicond. Sci. Technol. , vol.11 , Issue.2 , pp. 139-154
    • De Wolf, I.1
  • 29
    • 34548511373 scopus 로고    scopus 로고
    • Effect of high drain voltage on stress sensitivity in nMOSFETs
    • Oct.
    • R. Vatedka, H. Takao, K. Sawada, and M. Ishida, "Effect of high drain voltage on stress sensitivity in nMOSFETs," Sens. Actuators A, Phys., vol.140, no.1, pp. 89-93, Oct. 2007.
    • (2007) Sens. Actuators A, Phys. , vol.140 , Issue.1 , pp. 89-93
    • Vatedka, R.1    Takao, H.2    Sawada, K.3    Ishida, M.4
  • 30
    • 0023998758 scopus 로고
    • New method for the extraction of MOSFET parameters
    • Apr.
    • G. Ghibaudo, "New method for the extraction of MOSFET parameters," Electron. Lett., vol.24, no.9, pp. 543-545, Apr. 1988.
    • (1988) Electron. Lett. , vol.24 , Issue.9 , pp. 543-545
    • Ghibaudo, G.1
  • 31
    • 0031350971 scopus 로고    scopus 로고
    • Critical MOSFETs operation for low voltage/low power ICs: Ideal characteristics, parameter extraction, electrical noise and RTS fluctuations
    • Dec.
    • G. Ghibaudo, "Critical MOSFETs operation for low voltage/low power ICs: Ideal characteristics, parameter extraction, electrical noise and RTS fluctuations," Microelectron. Eng., vol.39, no.1-4, pp. 31-57, Dec. 1997.
    • (1997) Microelectron. Eng. , vol.39 , Issue.1-4 , pp. 31-57
    • Ghibaudo, G.1
  • 34
    • 35649025330 scopus 로고    scopus 로고
    • Hole mobility in silicon inversion layers: Stress and surface orientation
    • Oct.
    • G. Sun, Y. Sun, T. Nishida, and S. E. Thompson, "Hole mobility in silicon inversion layers: Stress and surface orientation," J. Appl. Phys., vol.102, no.8, pp. 084 501-1-084 501-7, Oct. 2007.
    • (2007) J. Appl. Phys. , vol.102 , Issue.8 , pp. 0845011-0845017
    • Sun, G.1    Sun, Y.2    Nishida, T.3    Thompson, S.E.4
  • 35
    • 27944488382 scopus 로고    scopus 로고
    • Performance studies on inversion channels of nMOSFETs under extreme mechanical load
    • G. Kizilirmak, W. Mokwa, and U. Schnakenberg, "Performance studies on inversion channels of nMOSFETs under extreme mechanical load," in Proc. IEEE Sens., 2004, vol.3, pp. 1585-1588.
    • (2004) Proc. IEEE Sens. , vol.3 , pp. 1585-1588
    • Kizilirmak, G.1    Mokwa, W.2    Schnakenberg, U.3
  • 36
    • 64549145359 scopus 로고    scopus 로고
    • Electron transport in Gate-All-Around uniaxial tensile strained-Si nanowire n-MOSFETs
    • P. Hashemi, L. Gomez, M. Canonico, and J. L. Hoyt, "Electron transport in Gate-All-Around uniaxial tensile strained-Si nanowire n-MOSFETs," in IEDM Tech. Dig., 2008, pp. 1-4.
    • (2008) IEDM Tech. Dig. , pp. 1-4
    • Hashemi, P.1    Gomez, L.2    Canonico, M.3    Hoyt, J.L.4
  • 37
    • 33645515499 scopus 로고    scopus 로고
    • Extraction of strained-Si metal- oxide-semiconductor field-effect transistor parameters using small signal channel conductance method
    • Feb.
    • G. K. Dalapati, S. Chattopadhyay, L. S. Driscoll, A. G. O'Neill, K. S. K. Kwa, and S. H. Olsen, "Extraction of strained-Si metal- oxide-semiconductor field-effect transistor parameters using small signal channel conductance method," J. Appl. Phys., vol.99, no.3, pp. 1-8, Feb. 2006.
    • (2006) J. Appl. Phys. , vol.99 , Issue.3 , pp. 1-8
    • Dalapati, G.K.1    Chattopadhyay, S.2    Driscoll, L.S.3    O'Neill, A.G.4    Kwa, K.S.K.5    Olsen, S.H.6
  • 38
    • 0038348088 scopus 로고    scopus 로고
    • Low-temperature electrical characteristics of strained-Si MOSFETs
    • Apr
    • N. Sugii and K. Washio, "Low-temperature electrical characteristics of strained-Si MOSFETs," Jpn. J. Appl. Phys., vol. 42, no. 4B, pp. 1924- 1927, Apr. 2003.
    • (2003) Jpn. J. Appl. Phys. , vol.42 , Issue.4 B , pp. 1924-1927
    • Sugii, N.1    Washio, K.2
  • 39
    • 34248652421 scopus 로고    scopus 로고
    • Low temperature influence on the uniaxially strained FD SOI nMOSFETs behavior
    • Sep./Oct.
    • M. de Souza, M. A. Pavanello, J. A. Martino, E. Simoen, and C. Claeys, "Low temperature influence on the uniaxially strained FD SOI nMOSFETs behavior," Microelectron. Eng., vol. 84, no. 9/10, pp. 2121- 2124, Sep./Oct. 2007.
    • (2007) Microelectron. Eng. , vol.84 , Issue.9-10 , pp. 2121-2124
    • De Souza, M.1    Pavanello, M.A.2    Martino, J.A.3    Simoen, E.4    Claeys, C.5
  • 40
    • 0019916789 scopus 로고
    • A graphical representation of the piezoresistance coefficients in silicon
    • Jan.
    • Y. Kanda, "A graphical representation of the piezoresistance coefficients in silicon," IEEE Trans. Electron Devices, vol.ED-29, no.1, pp. 64-70, Jan. 1982.
    • (1982) IEEE Trans. Electron Devices , vol.ED-29 , Issue.1 , pp. 64-70
    • Kanda, Y.1


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