Applications of excimer laser in nanofabrication

Applied Physics A: Materials Science and Processing

Volumn 98, Issue 1, 2010, Pages 9-59

  Xia, Qiangfei ^a   Chou, Stephen Y ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL WIDTHS; DIFFERENT SUBSTRATES; DNA STRETCHING; FABRICATION DEFECTS; HEAT EFFECT; HIGH FIDELITY; LASER-ASSISTED; LINE EDGE ROUGHNESS; METAL GRATING; METAL NANOPARTICLE ARRAYS; METAL NANOPARTICLES; NANOFABRICATION; NANOFLUIDIC CHANNEL; NANOPARTICLE ARRAY; NEW STRUCTURES; NOVEL APPLICATIONS; POLYMER NANOSTRUCTURES; POLYMERIC RESIST; POST-FABRICATION; PULSE DURATIONS; SELF-LIMITED; SI-WAVEGUIDE; SINGLE LASER PULSE; THERMAL OXIDATION; THIN METAL FILMS; TOP SURFACE; VARIOUS SUBSTRATES;

ASPECT RATIO; CHROMIUM; EXCIMER LASERS; FABRICATION; GAS LASERS; LASER PULSES; LASER SURGERY; LOCAL AREA NETWORKS; METAL MELTING; METALS; MOLDS; MOLTEN MATERIALS; MONOLAYERS; NANOFLUIDICS; NANOIMPRINT LITHOGRAPHY; NANOPARTICLES; NUCLEIC ACIDS; PHOTORESISTS; PLATES (STRUCTURAL COMPONENTS); POLYMER MELTS; POLYMERS; PULSED LASER APPLICATIONS; ROUGHNESS MEASUREMENT; SILICA; SMELTING; SUBSTRATES; SURFACE TOPOGRAPHY; SURFACES; TWO DIMENSIONAL;

FUSED SILICA;

EID: 71249117820     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-009-5455-0     Document Type: Article

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