Fabrication of ideally ordered anodic porous alumina with 63 nm hole periodicity using sulfuric acid

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 2, 2001, Pages 569-572

  Asoh, Hidetaka ^a   Nishio, Kazuyuki ^a   Nakao, Masashi ^b   Yokoo, Atsushi ^b   Tamamura, Toshiaki ^b   Masuda, Hideki ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

^b NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRON BEAM LITHOGRAPHY; HOLE MOBILITY; INDENTATION; NANOSTRUCTURED MATERIALS; POROUS MATERIALS; SILICON CARBIDE; SULFURIC ACID; TEXTURES;

ANODIC POROUS ALUMINA; ANODIZATION; HOLE CONFIGURATION; HOLE PERIODICITY; NANOCHANNEL ARRAYS; NANOINDENTATION;

ALUMINA;

EID: 0035272696     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1347039     Document Type: Article

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