Lithographically induced self-assembly of periodic polymer micropillar arrays

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3197-3202

  Chou, Stephen Y ^a   Zhuang, Lei ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033268574     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590979     Document Type: Article

References (15)

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2. For a summary on phase separation of diblock copolymers, see, for example, F. S. Bates and G. H. Fredrickson, Annu. Rev. Phys. Chem. 41, 525 (1990), and references therein.
3. For a good summary on surface effects, see, for example, G. Krausch, Mater. Sci. Eng., R. 14, 1 (1995), and references therein.
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8. Science 272, 85 (1996).
9. S. Y. Chou and L. Zhuang (unpublished, 1997);
10. Meeting of the American Physical Society, March 1999.
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13. H. Benard, Rev Gen. Sci. Pure Appl. 11, 1261 (1900).
14. S. Y. Chou, L. Zhuang, and L. J. Guo, Appl. Phys. Lett. 75, 1004 (1999).
15. S. Y. Chou, W. Wu, and L. Zhuang (unpublished).