SCOPUS 정보 검색 플랫폼

Volumn 89, Issue 7, 2006, Pages

In situ real time monitoring of nanosecond imprint process

Author keywords

[No Author keywords available]

Indexed keywords

IMPRINT PROCESSES; PATTERN TRANSFER; REAL TIME IMPRINT MONITORING SYSTEM (RIMS);

LASER BEAM EFFECTS; MOLDS; PHOTORESISTS; REAL TIME SYSTEMS;

NANOTECHNOLOGY;

EID: 33747477563 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2335952 Document Type: Article

Times cited : (12)

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