Applications of microelectromechanical systems in industrial processes and services

IEEE Transactions on Industrial Electronics

Volumn 56, Issue 4, 2009, Pages 913-925

  Dean Jr , Robert Neal ^a   Luque, Antonio ^b  

^a AUBURN UNIVERSITY   (United States)

^b UNIVERSITY OF SEVILLE   (Spain)

Author keywords

Gyroscopes; Microelectromechanical systems (MEMS); Particle production

Indexed keywords

ANGULAR MOVEMENTS; COMPUTER-AIDED DESIGNS; FABRICATION TECHNIQUES; FUTURE APPLICATIONS; HISTORICAL PERSPECTIVES; INDUSTRIAL PROCESS; INDUSTRIAL SECTORS; MICROELECTROMECHANICAL SYSTEMS (MEMS); PARTICLE PRODUCTION; PROCESS FLOWS; PRODUCTION SECTORS;

APPLICATIONS; COMPUTER AIDED DESIGN; FLOW SIMULATION; GYROSCOPES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; THICKNESS MEASUREMENT;

COMPOSITE MICROMECHANICS;

EID: 65549088627     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2009.2013691     Document Type: Conference Paper

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