Development of a dual-axis thermal convective gas gyroscope

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1301-1306

  Dau, Van Thanh ^a   Dao, Dzung Viet ^a   Shiozawa, Tatsuo ^b   Kumagai, Hideo ^b   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b Iida   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY UTILIZATION; HEAT TRANSFER; SEMICONDUCTOR DOPING; SENSITIVITY ANALYSIS; SENSORS; SILICON; TUNGSTEN; X RAY ANALYSIS;

GAS GYROSCOPES; P-TYPE SILICON; SENSING ELEMENTS; THERMORESISTIVE EFFECTS;

GYROSCOPES;

EID: 33745061023     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/026     Document Type: Article

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