CAD challenges for microsensors, microactuators, and microsystems

Proceedings of the IEEE

Volumn 86, Issue 8, 1998, Pages 1611-1626

  Senturia, Stephen D ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

CAD; Design; Macromodels; Simulation; Test structures

Indexed keywords

ACTUATORS; COMPUTER AIDED ENGINEERING; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; SENSORS;

MACROMODELS; MICROSYSTEMS;

COMPUTER AIDED DESIGN;

EID: 0032141012     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.704266     Document Type: Article

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