Compensation of parasitic effects for a silicon tuning fork gyroscope

IEEE Sensors Journal

Volumn 6, Issue 3, 2006, Pages 596-603

  Günthner, Stefan ^b   Egretzberger, Markus ^c   Kugi, Andreas ^a,c   Kapser, Konrad ^b   Hartmann, Bernhard ^b   Schmid, Ulrich ^c   Seidel, Helmut ^a,c  

^a IEEE   (Germany)

^b MEMS Design and Technology ^*  (Germany)

^c SAARLAND UNIVERSITY   (Germany)

Author keywords

Gyroscopes; Laser ablation; Micromachining; Piezoresistive devices; Silicon

Indexed keywords

PARASITIC EFFECTS; PIEZOELECTRIC THIN FILM ACTUATORS; TORSIONAL MOTION; TUNING FORK;

CORIOLIS FORCE; FINITE ELEMENT METHOD; LEAKAGE CURRENTS; PIEZOELECTRIC ACTUATORS; SHEAR STRESS; SILICON; TRIMMING;

GYROSCOPES;

EID: 33947136808     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.874451     Document Type: Article

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