Miniaturized flowthrough microdispenser with piezoceramic tripod actuation

Journal of Microelectromechanical Systems

Volumn 14, Issue 1, 2005, Pages 134-140

  Bergkvist, Jonas ^a   Lilliehorn, Tobias ^b   Nilsson, Johan ^a   Johansson, Stefan ^b   Laurell, Thomas ^a  

^a LUND INSTITUTE OF TECHNOLOGY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

Author keywords

Dispenser; Droplet; Lead zirconate titanate (PZT); Miniaturization; Piezoactuator

Indexed keywords

ELECTRIC POTENTIAL; MICROACTUATORS; MICROMACHINING; PIEZOELECTRIC DEVICES; PRINTED CIRCUIT DESIGN; SEMICONDUCTING LEAD COMPOUNDS; THICK FILMS;

DROPLET VELOCITY; LEAD ZIRCONATE TITANATE (PZT) PIEZOCERAMIC ACTUATOR DESIGN; MICRODISPENSER; MINIATURIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 14044276907     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839000     Document Type: Article

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