A 0.1°/HR bias drift electronically matched tuning fork microgyroscope

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 6-9

  Sharma, Ajit ^a   Zaman, Mohammad Faisal ^a   Zucher, Mark ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; TUNING;

BIAS DRIFT; CMOS ASIC; CON TROL ALGORITHMS; INTERNATIONAL CONFERENCES; MICRO GYROSCOPE; MICRO-ELECTRO MECHANICAL SYSTEMS; MODE-MATCHING; QUADRATURE ERRORS; SENSE MODE; TUNING FORK; TUNING FORK GYROSCOPES;

GYROSCOPES;

EID: 50149112028     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443579     Document Type: Conference Paper

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