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Volumn 13, Issue 2, 2005, Pages 185-195

The development of a MEMS gyroscope for absolute angle measurement

Author keywords

Angle measurement; Angular rate; Gyroscope; Microelectromechanical systems (MEMS)

Indexed keywords

ANGLE MEASUREMENT; BANDWIDTH; COMPUTER SIMULATION; FEEDBACK CONTROL; MICROELECTROMECHANICAL DEVICES; NONLINEAR CONTROL SYSTEMS; STATE SPACE METHODS; VIBRATIONS (MECHANICAL);

EID: 15044362891     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2004.839568     Document Type: Article
Times cited : (75)

References (17)
  • 1
  • 3
    • 0032137121 scopus 로고    scopus 로고
    • "Application of MEMS technology in automotive sensors and actuators"
    • Aug
    • D. S. Eddy and D. R. Sparks, "Application of MEMS technology in automotive sensors and actuators," Proc. IEEE, vol. 86, no. 8, pp. 1747-1755, Aug. 1998.
    • (1998) Proc. IEEE , vol.86 , Issue.8 , pp. 1747-1755
    • Eddy, D.S.1    Sparks, D.R.2
  • 5
    • 0030648203 scopus 로고    scopus 로고
    • "Dual axis operation of a micromachined rate gyroscope"
    • T. Juneau et al., "Dual axis operation of a micromachined rate gyroscope," in Proc. Tranducers'97, vol. 2, 1997, pp. 883-886.
    • (1997) Proc. Tranducers'97 , vol.2 , pp. 883-886
    • Juneau, T.1
  • 6
    • 0010058696 scopus 로고    scopus 로고
    • "Design, simulation, and implementation of two novel micromechanical vibratory-rate gyroscopes"
    • Carnegie-Mellon Univ., Philadelphia, PA, May
    • M. Kranz and G. K. Fedder, "Design, simulation, and implementation of two novel micromechanical vibratory-rate gyroscopes," Dept. Elect. Comput. Eng., Carnegie-Mellon Univ., Philadelphia, PA, May 1998.
    • (1998) Dept. Elect. Comput. Eng.
    • Kranz, M.1    Fedder, G.K.2
  • 8
    • 0033888240 scopus 로고    scopus 로고
    • "A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes"
    • Y. Mochida, M. Tamura, and K. Ohwada, "A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes," Sens. Actuators A, Phys., vol. 80, pp. 170-178, 2000.
    • (2000) Sens. Actuators A, Phys. , vol.80 , pp. 170-178
    • Mochida, Y.1    Tamura, M.2    Ohwada, K.3
  • 11
    • 0034229447 scopus 로고    scopus 로고
    • "Demonstration of integrated lateral and longitudinal control for the operation of automated vehicles in platoons"
    • Jul
    • R. Rajamani, H. S. Tan, B. Law, and W. B. Zhang, "Demonstration of integrated lateral and longitudinal control for the operation of automated vehicles in platoons," IEEE Trans. Contr. Syst. Technol. vol. 8, no. 4, pp. 695-708, Jul. 2000.
    • (2000) IEEE Trans. Contr. Syst. Technol. , vol.8 , Issue.4 , pp. 695-708
    • Rajamani, R.1    Tan, H.S.2    Law, B.3    Zhang, W.B.4
  • 14
    • 15044356189 scopus 로고
    • MCNC MEMS Technology Applications Center, Research Traingle Park, NC, Oct. rev. 3
    • MCNC MEMS Technology Applications Center, Research Traingle Park, NC, Oct. 1994. rev. 3.
    • (1994)
  • 15
    • 0026968617 scopus 로고
    • "Electrostatic comb drive levitation and control method"
    • Dec
    • W. C. Tang, M. G. Lim, and R. T. Howe, "Electrostatic comb drive levitation and control method," J. Microelectromech. Syst., vol. 1, no. 4, pp. 170-178, Dec. 1992.
    • (1992) J. Microelectromech. Syst. , vol.1 , Issue.4 , pp. 170-178
    • Tang, W.C.1    Lim, M.G.2    Howe, R.T.3
  • 16
    • 0011946530 scopus 로고    scopus 로고
    • "Characteristic modes of electrostatic comb-drive X-Y microactuators"
    • T. Harness and R. R. A. Syms, "Characteristic modes of electrostatic comb-drive X-Y microactuators," J. Miromech. Microeng., vol. 9, pp. 1-8, 1999.
    • (1999) J. Miromech. Microeng. , vol.9 , pp. 1-8
    • Harness, T.1    Syms, R.R.A.2
  • 17
    • 0018005107 scopus 로고
    • "Theory and error analysis of vibrating-member gyroscopes"
    • Aug
    • B. Friedland and M. Hutton, "Theory and error analysis of vibrating-member gyroscopes," IEEE Trans. Autom. Control, vol. AC-23, no. 4, pp. 545-556, Aug. 1978.
    • (1978) IEEE Trans. Autom. Control , vol.AC-23 , Issue.4 , pp. 545-556
    • Friedland, B.1    Hutton, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.