Design and implementation of capacitive proximity sensor using microelectromechanical systems technology

IEEE Transactions on Industrial Electronics

Volumn 45, Issue 6, 1998, Pages 886-894

  Chen, Zhenhai ^a   Luo, Ren C ^a  

^a Rockwell Automation/Allen Bradley   (United States)

Author keywords

Fringe capacitance; Microelectromechanical systems; Proximity sensor

Indexed keywords

CAPACITANCE; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY;

FRINGE CAPACITANCE;

PROXIMITY SENSORS;

EID: 0032288370     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/41.735332     Document Type: Article

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