A novel bulk micromachined gyroscope with slots structure working at atmosphere

Sensors and Actuators, A: Physical

Volumn 107, Issue 2, 2003, Pages 137-145

  Xiong, Bin ^a   Che, Lufeng ^a   Wang, Yuelin ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Angular rate sensor; Bulk micromachining; MEMS; Slide film damping

Indexed keywords

ATMOSPHERIC TEMPERATURE; ELECTROSTATIC DEVICES; GLASS BONDING; GYROSCOPES; MICROMACHINING; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; SPRINGS (COMPONENTS);

ANGULAR RATE SENSOR; BULK MICROMACHINING; SLIDE FILM DAMPING; SLOTS GYROSCOPE;

MICROSENSORS;

EID: 0142060054     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00296-6     Document Type: Article

References (10)

1. N. Yazdi, F. Ayazi, K. Najafi, Micromachined interial sensors, Proc. IEEE 86 (8) (1998) 1640-1659.
2. C. Song, Commercial vision of silicon based interial sensors, in: Proceedings of the Nineth International Conference on Solid State Sensors and Actuators, Transducers'97 (digest of technical papers), Chicago 1997, pp. 839-842.
3. K. Maenaka, T. Fujita, Y. Konishi, M. Maeda, Analysis of highly sensitive silicon gyroscope with cantilever beam as vibrating mass, Sens. Actuators A54 (1996) 568-573.
4. W.A. Clark, R.T. Howe, R. Horowitz, Surface micromachined Z-axis vibratory rate gyroscope, in: Proceedings of the Technical Digest of Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 2-6 June 1996, pp. 283-287.
5. Y. Mochida, M. Tamura, K. Ohwada, A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes, in: Proceedings IEEE Micro Electro Mechanical Systems, MEMS'99, January 1999, pp. 618-623.
6. M. Lutz, W. Goldere, J. Gerstenmeier, J. Marek, B. Maihofer, S. Mahler, H. Munzel, U. Bischof, A precision yaw rate sensor in silicon micromachining, in: Proceedings of The Nineth International Conference on Solid State Sensors and Actuators, Transducers'97 (digest of technical papers), Chicago, 1997, pp. 847-850.
7. X.X. Li, M.H. Bao, H. Yang, S.Q. Shen, D.R. Lu, A micromachined piezoresistive angular rate sensor with a composite beam structure, Sens. Actuators A72 (1999) 217-223.
8. F. Gretillat, M.A. Gretillat, N.F. de Rooij, Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation, J. Microelectromech. Syst. 8 (3) (1999) 243-250.
9. Y.H. Cho, A.P. Pisano, R.T. Howe, Viscous damping model for laterally oscillating microstructures, J. Microelectromech. Sys. 3 (2) (1994) 81-87.
10. Y.H. Cho, B.M. Kwak, A.P. Pisano, R.T. Howe, Slide film damping in laterally driven microstructures, Sens. Actuators A40 (1994) 31-39.