Type I and Type II micromachined vibratory gyroscopes

Record - IEEE PLANS, Position Location and Navigation Symposium

Volumn 2006, Issue , 2006, Pages 586-593

  Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY TRANSFER; MICROELECTROMECHANICAL DEVICES; ROTATION; VIBRATION MEASUREMENT;

ANGULAR RATE MEASURING; CORIOLIS FORCES; MICROMACHINED VIBRATORY GYROSCOPES (MVG); RATE GYROSCOPES;

GYROSCOPES;

EID: 33845565928     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PLANS.2006.1650648     Document Type: Conference Paper

References (11)

1. A. M. Shkel and R.T. Howe "Surface Micromachined Rate Integrating Gyroscopes" US Patent No. 6,481,285
2. C. Acar and A. M. Shkel "Non-Resonant Four Degrees-of-Freedom Micromachined Gyroscope" U.S. Patent No. 6,845,669
3. C. Painter and A. M. Shkel "Multi Stage Control Architecture for Error Supression in Micromachined Gyroscopes" U.S. Patent No. 6,934,660
4. C. Acar "Robust Micromachined Vibratory Gyroscopes" Ph.D. thesis, Dept. of MAE, University of California - Irvine 2004
5. C. Painter "Micromachined Vibratory Gyroscopes with Imperfections" Ph.D. thesis, Dept. of MAE, University of California - Irvine 2005
6. C. Acar and A. M. Shkel "An Approach for Increasing Drive-Mode Bandwidth of MEMS Vibratory Gyroscopes" Journal of Microelectro-mechanical Systems Vol. 14, No. 3, pp. 520-528, 2005
7. C. Acar and A. M. Shkel "Inherently Robust Micromachined Gyroscopes With 2 DOF Sense-Mode Oscillator" Journal of Microelectromechanical Systems Vol. 15, No. 2, pp. 380-387, 2006
8. C. Acar and A. M. Shkel "Non-Resonant Micromachined Gyroscopes with Mode-Decoupling" IEEE Sensors Journal vol. 3, No. 4, August 2003, pp. 497-506
9. C. Painter and A. M. Shkel "Active Structural Error Supression in MEMS Vibratory Rate Integrating Gyroscopes" IEEE Sensors Journal Vol. 3, No.5, pp. 595-606, 2003
10. N. Yazdi, F. Ayazi, and K. Najafi "Micromachined Inertial Sensors" Proceedings of the IEEE, volume 86, Number 8 pp. 1641-1659, August, 1998
11. J. Soderkvist "Micromachined gyroscopes" Sensors and Actuators A volume 43, pp.65-71, 1994