Fabrication and control of an electrostatically levitated rotating gyro

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6959, Issue , 2008, Pages

  Ellis, Charles D ^a   Wilamowski, Bogdan M ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

Electrostatic; Gyroscope; Inertial measurement system

Indexed keywords

INERTIAL MEASUREMENT SYSTEM; MEMS PROCESSING;

ELECTROSTATICS; MEASUREMENT THEORY; MEMS;

GYROSCOPES;

EID: 44349087507     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.783861     Document Type: Conference Paper

References (2)

1. Murakoshi, T., Electrostatically Levitated Ring-Shaped Rotational-Gyro/Accelerometer, Japanese Journal of Applied Physics. Part 2. Letters, vol: 42, issue: 4B, 2003, pp: 2468-2472.
2. Damrongsak, B. Kraft, M., A Micromachined Electrostatically Suspended Gyroscope with Digital Force Feedback, Sensors, 2005 IEEE, pp. 4.