New technology for fluidic microsystems based on PCB technology

Sensors and Actuators, A: Physical

Volumn 77, Issue 2, 1999, Pages 98-105

  Merkel, Tobias ^a   Graeber, Michael ^a   Pagel, Lienhard ^a  

^a UNIVERSITY OF ROSTOCK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DENSITY (SPECIFIC GRAVITY); FLUIDIC DEVICES; PH EFFECTS; SENSORS; THERMAL EFFECTS; VISCOSITY;

FLUIDIC MICROSYSTEMS;

PRINTED CIRCUIT MANUFACTURE;

EID: 0033355466     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00062-X     Document Type: Article

References (16)

1. G. Herrmann (Publisher), Handbuch der Leiterplattentechnik, Band 3, Eugen G. Leuze Verlag, Saulgau, 1993.
2. L. Pagel, T. Merkel, M. Gräber, Fluidische Mikrosysteme in Leiterplattentechnologie-Kompatibilität zur Elektrotechnik, in: 3. Magdeburger Maschinenbautage, Logos Verlag, Berlin, 1997.
3. Fujita H. Future of actuators and microsystems. Sensors and Actuators A. 56:1996;105-111.
4. Zengerle R., Ulrich J., Kluge S., Richter M., Richter A. A bidirectional silicon micropump. Sensors and Actuators A. 50:1995;81-86.
5. Nguyen N.T., Kiehnscherf R. Low-cost silicon sensors for mass flow measurement of liquids and gases. Sensors and Actuators A. 49:1995;17-20.
6. van Kuijk J., Lammerink T.S.J., de Bree H.-E., Elwenspoek M., Fluitman J.H.J. Multi-parameter detection in fluid flows. Sensors and Actuators A. 46-47:1995;369-372.
7. Stehr M., Messner S., Sandmaier H., Zengerle R. The VAMP - a new device for handling liquid or gases. Sensors and Actuators A. 57:1996;153-157.
8. Kwok C.Y., Lin K.M., Huang R.S. A silicon thermocapacitive flow sensor with frequency modulated output. Sensors and Actuators A. 57:1996;35-39.
9. Kersjes R., Liebscher F., Spiegel E., Manoli Y., Mokwa W. An invasive catheter flow sensor with on-chip CMOS readout electronics for the on-line determination of blood flow. Sensors and Actuators A. 54:1996;563-567.
10. Robertson J.K., Wise K.D. A low pressure micromachined flow modulator. Sensors and Actuators A. 71:1998;98-106.
11. M. Heschel, M. Müllenborn, S. Bouwstra, Fabrication and characterization of truly three-dimensional diffuser/nozzle microstructures in silicon, Actuator 96, Bremen 1996, Germany, pp. 72-75.
12. B. Büstgens, W. Bacher, W. Menz, W.K. Schomburg, Micropump manufactured by photolithography and diaphragm transfer, Actuator 96, Bremen 1996, Germany, pp. 128-131.
13. G. Temmel, T. Hermes, R. Paneva, S. Kluge, P. Woias, A micro mechanical system for liquid dosage and nebulization, Actuator 96, Bremen 1996, Germany, pp. 57-60.
14. J. Franz, H. Baumann, H.-P. Trah, A monolithic silicon micro-liquid handling system with bimetallic valve and calorimetric flow sensor, Actuator 96, Bremen 1996, Germany, pp. 29-32.
15. M. Gräber, Entwicklung einer Technologie für fluidische Mikrosysteme auf Basis der Leiterplattentechnologie, Dissertation submitted to Rostock University, 1998.
16. J. Vollmer, H. Hein, U. Köhler, W. Menz, Microminiature Fluidic Beam Elements as Electro-Pneumatic Converters, Actuator 94, Bremen 1994, Germany, pp. 38-41.