A planar, x-axis, single-crystalline silicon gyroscope fabricated using the extended SBM process

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 556-559

  Kim, Jongpal ^a   Park, Sangjun ^a   Kwak, Donghun ^a   Ko, Hyoungho ^a   Cho, Dong Il ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CAPACITANCE; ELECTRODES; MASKS; MICROMACHINING; NATURAL FREQUENCIES; SENSORS; SILICON; SILICON ON INSULATOR TECHNOLOGY; STIFFNESS;

ELECTRICAL ISOLATION TECHNIQUES; FABRICATION PROCESSES; SACRIFICIAL BULK MICROMACHINING (SBM); WAFER BONDING;

GYROSCOPES;

EID: 3042786075     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)

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