Large-stroke microelectrostatic actuators for vertical translation of micromirrors used in adaptive optics

IEEE Transactions on Industrial Electronics

Volumn 52, Issue 4, 2005, Pages 974-983

  He, Siyuan ^a   Mrad, Ridha Ben ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

Adaptive optics; Conformal transformation; Microelectrostatic actuator; Micromirror; Optical microelectro mechanical systems (optical MEMS); Repulsive force actuator; Surface micromachining

Indexed keywords

ADAPTIVE OPTICS; COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS;

CONFORMAL TRANSFORMATION; MICROMIRROR; OPTICAL MICROELECTROMECHANICAL SYSTEMS (OPTICAL MEMS); REPULSIVE FORCE ACTUATOR; SURFACE MICROMACHINING;

ELECTROSTATIC ACTUATORS;

EID: 24144456246     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2005.851682     Document Type: Article

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