Dislocation networks formed by silicon wafer direct bonding

Materials Science Forum

Volumn 590, Issue , 2008, Pages 57-78

  Reiche, M ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

Defect structure and properties; Dislocation; Silicon; Wafer bonding

Indexed keywords

DISLOCATIONS (CRYSTALS); HYDROPHOBICITY; LIGHT EMISSION; SILICON; SILICON WAFERS; SURFACE CHEMISTRY;

CRYSTALLINE SILICON SUBSTRATES; DISLOCATION NETWORKS; DISLOCATION STRUCTURES; HYDROPHOBIC SURFACES; OXIDE LAYER; STRUCTURE AND PROPERTIES; WAFER DIRECT BONDING;

WAFER BONDING;

EID: 64749095733     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.590.57     Document Type: Article

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