Wear characteristics of microscopic bushings for MEMS applications investigated by an AFM

Journal of Micromechanics and Microengineering

Volumn 17, Issue 9, 2007, Pages 1877-1887

  Chung, Koo Hyun ^a   Jang, Cheol Eun ^a   Kim, Dae Eun ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BUSHINGS; COMPOSITE MICROMECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; NITRIDES; OXIDES; REAL TIME SYSTEMS; SILICA; SILICON COMPOUNDS; SILICON NITRIDE;

SILICON OXIDES; WEAR CHARACTERISTICS;

NONMETALS;

EID: 51649086421     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/9/017     Document Type: Conference Paper

References (47)

1. Kim D E, Chung K H and Cha K H 2003 Tribological design methods for minimum surface damage of HDD slider Tribol. Int. 36 467-73
2. Douglass M 2003 DMD reliability: a MEMS success story Proc. SPIE 4980 1-11
3. Gabiel K J, Behi F, Mahadevan R and Mehregany M 1990 In-situ friction and wear measurements in integrated polysilicon mechanisms Sensors Actuators A 21 184-8
4. Mehregany M and Senturia S D 1992 Measurement of wear in polysilicon micro-motors IEEE Trans. Electron. Device 39 1136-43
5. Tanner D M, Miller W M, Peterson K A, Dugger M T, Eaton W P, Irwin L W, Senft D C, Smith N F, Tangyunyong P and Miller S L 1999 Frequency dependence of the lifetime of a surface micromachined microengine driving a load Microelectron. Reliab. 39 401-14
6. Tanner D M, Walraven J A, Barnes S M, Smith N F, Bitsie F and Swanson S E 2001 Reliability of a MEMS torsional ratcheting actuator Proc. 39th Ann. Int. Reliab. Phys. Symp. pp 81-90
7. Beerschwinger U, Albrecht T, Mathieson D, Reuben R L, Yang S J and Taghizadeh M 1995 Wear at microscopic scales and light loads for MEMS applications Wear 181-183 426-35
8. Beerschwinger U, Mathieson D, Reuben R L and Yang S J 1994 A study of wear on MEMS contact morphologies J. Micromech. Microeng. 4 95-105
9. Tavrow L S, Bart S F and Lang J H 1992 Operational characteristics of micro-fabricated electric motors Sensors Actuators A 35 33-44
10. Tanner D M 2000 Reliability of surface micromachined microelectromechanical actuators Proc. 22nd Int. Conf. Mircoelectron. pp 97-104
11. Mani S S et al 2000 Effect of W coating on microengine performance IEEE 38th Ann. Int Reliab. Phys. Symp. pp 146-51
12. Smallwood S A, Eapen K C, Patton S T and Zabinski J S 2006 Performance results of MEMS coated with a conformal DLC Wear 260 1179-89
13. Sundararajan S and Bhushan B 1998 Micro/nanotribological studies of polysilicon and SiC films for MEMS applications Wear 217 251-61
14. Krauss A R et al 2001 Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices Diam. Relat. Mater. 10 1952-61
15. Mayer T M, Elam J W, George S M, Kotula P G and Goeke R S 2003 Atomic-layer deposition of wear-resistant coatings for microelectromechanical devices Appl. Phys. Lett. 82 2883-5
16. Nistorica C, Liu J-F, Gory I, Skidmore D, Mantiziba F M, Gnade E and Kim J 2005 Tribological and wear studies of coatings fabricated by atomic layer deposition and by successive ionic layer adsorption and reaction for microelectromechanical devices J. Vac. Sci. Technol. A 23 836-40
17. Ashurst W R, Jang Y J, Magagnin L, Carraro C, Sung M M and Maboudian R 2004 Nanometer-thin titania films with SAM-level stiction and superior wear resistance for reliable MEMS performance 17th IEEE Int. Conf. MEMS pp 153-6
18. Radhakrishnan G, Robertson R E, Cole R C and Adams P M 2003 Hybrid pulsed layer deposition and Si-surface micromachining process for integrated TiC coating sin moving MEMS Appl. Phys. A 77 175-84
19. Carraro C, Magagnin L and Maboudian R 2002 Selective metallization of silicon micromechanical devices Electrochim. Acta 47 2583-8
20. Mastrangelo C H 1997 Adhesion-related failure mechanisms in micromechanical devices Tribol. Lett. 3 223-38
21. Maboudian R and Howe R T 1997 Critical review: adhesion in surface micro-mechanical structures J. Vac. Sci. Technol. B 15 1-20
22. Srinivasan U, Houston M R, Howe R T and Maboudian R 1998 Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines J. Microelectromech. Syst. 7 252-60
23. Maboudian R, Ashurst W R and Carraro C 2000 Self-assembled monolayers as anti-stiction coating for MEMS: characteristics and recent developments Sensors Actuators A 82 219-23
24. Eapen K C, Patton S T and Zabinski J S 2002 Lubrication of microelectromechanical Systems (MEMS) using bound and mobile phase of Fomblin Zdol Tribol. Lett. 12 35-41
25. Henck S A 1997 Lubrication of digital micromirror devices™ Tribol. Lett. 3 239-47
26. Alley R L, Mai P, Komvopoulos K and Howe R T 1993 Surface roughness modification of interfacial contacts in polysilicon microstructures Proc. 7th Int. Conf. Solid-State Sensors Actuators pp 288-91
27. Yee Y, Chun K, Lee J D and Kim C 1996 Polysilicon surface-modification technique to reduce sticking of microstructures Sensors Actuators A 52 145-50
28. Fan L-S, Tai Y C and Muller R S 1988 Integrated movable micromechanical structures for sensors and actuators IEEE Trans. Electron. Device 35 724-30
29. Zhang W-M and Meng G 2006 Friction and wear study of the hemispherical rotor bushings in a variable capacitance micromotor Microsyst. Technol. 12 283-92
30. Fukui S and Kaneko R 1993 Estimation of gas film lubrication effects beneath sliding bushings of microrotors using a molecular gas film lubrication equation Wear 168 175-9
31. Akiyama T, Collard D and Fujita H 1997 Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS J. Microelectromech. Syst. 6 10-17
32. Beerschwinger U, Milne N G, Yang S J, Reuben R L, Sangster A J and Ziad H 1994 Coupled electrostatic and mechanical FEA of a micromotor J. Microelectromech. Syst. 3 162-71
33. Tanner D M, Peterson K A, Irwin L W, Tangyunyong P, Miller W M, Eaton W P, Smith N F and Rodgers M S 1998 Linkage design effect on the reliability of surface micromachined microengines driving a load Proc. SPIE. 3512 215-26
34. Deb N and Blanton R D 2000 Analysis of failure sources in surface-micromachined MEMS Proc. Int. Test Conf. pp 739-49
35. Jiang T and Blanton R D 1999 Particulate failures for surface-micromachined MEMS Proc. Int. Test Conf. pp 329-37
36. Bhushan B and Li X 1997 Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical devices J. Mater. Res. 12 54-63
37. Jung Y-G, Lawn B R, Martyniuk M, Huang H and Hu X Z 2004 Evaluation of elastic modulus and hardness of thin films by nanoindentation J. Mater. Res. 19 3076-80
38. Chung K H, Oh J K, Moon J T and Kim D E 2004 Particle monitoring method using acoustic emission signal for analysis of slider/disk/particle interaction Tribol. Int. 37 849-57
39. Xiao X and Qian L 2000 Investigation of humidity-dependent capillary force Langmuir 16 8153-8
40. He M, Blum A S, Aston D E, Buenviaje C, Overney R M and Luginbühl R 2001 Critical phenomena of water bridges in nanoasperity contacts J. Chem. Phys. 114 1355-60
41. Rabinowicz E 1995 Friction and Wear of Materials (New York: Wiley-Interscience)
42. Chung K H and Kim D E 2003 Fundamental investigation of micro wear rate using an atomic force microscope Tribol. Lett. 15 135-44
43. Chung K H, Lee Y H and Kim D E 2005 Characteristics of fracture during the approach process and wear mechanism of a silicon AFM tip Ultramicroscopy 102 161-71
44. Chung K H and Kim D E 2004 Wear characteristics of atomic force microscope tip Int. J. Precis. Eng. Manuf. 5 39-45
45. Fujimasa I 1996 Micromachines: a New Era in Mechanical Engineering (New York: Oxford University Press)
46. Cha K H, Chung K H and Kim D E 1999 Effect of slider load on the wear debris contamination tendency of head/slider IEEE Trans. Magn. 35 2355-7
47. Kim D E, Park J W, Han D K, Park Y S, Chung K H and Park N Y 2001 Strategies for improvement of tribological characteristics at the head/disk interface IEEE Trans. Magn. 37 912-7