Linkage design effect on the reliability of surface micromachined microengines driving a load

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3512, Issue , 1998, Pages 215-226

  Tanner, Danelle M ^a   Peterson, Kenneth A ^a   Irwin, Lloyd W ^a   Tangyunyong, Paiboon ^a   Miller, William M ^a   Eaton, William P ^a   Smith, Norman F ^a   Rodgers, M Steven ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA REDUCTION; ELECTROSTATIC DEVICES; FAILURE ANALYSIS; MATHEMATICAL MODELS; MICROACTUATORS; MICROMACHINING; NATURAL FREQUENCIES; PARAMETER ESTIMATION; RELIABILITY; STATISTICAL METHODS;

ELECTROSTATIC ACTUATORS; SURFACE MICROMACHINED MICROENGINES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032293023     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324060     Document Type: Conference Paper

References (15)