Particulate failures for surface-micromachined MEMS

IEEE International Test Conference (TC)

Volumn , Issue , 1999, Pages 329-337

  Jiang, Tao ^a   Blanton, R D ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CONTAMINATION; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; MONTE CARLO METHODS; PARTICLES (PARTICULATE MATTER); RESONATORS; SCHEMATIC DIAGRAMS; SEMICONDUCTOR DEVICE MANUFACTURE;

PARTICULATE FAILURES; SOFTWARE PACKAGE HSPICE; SURFACE MICROMACHINED MICRORESONATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0033336297     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)