Lubrication of microelectromechanical systems (MEMS) using bound and mobile phases of Fomblin Zdol®

Tribology Letters

Volumn 12, Issue 1, 2002, Pages 35-41

  Eapen, Kalathil C ^a   Patton, Steven T ^a   Zabinski, Jeffrey S ^b  

^a UNIVERSITY OF DAYTON RESEARCH INSTITUTE   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Bound and mobile phases; Fomblin Zdol ; Lubricant replenishment; MEMS lubrication

Indexed keywords

LUBRICATION; MICROELECTROMECHANICAL SYSTEM;

EID: 0042957022     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1013971321480     Document Type: Conference Paper

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