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Applied Physics A: Materials Science and Processing

Volumn 77, Issue 2, 2003, Pages 175-184

Hybrid pulsed laser deposition and Si-surface-micromachining process for integrated TiC coatings in moving MEMS

(4) Radhakrishnan, G a Robertson, R E a Cole, R C a Adams, P M a

a AEROSPACE CORPORATION (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; HIGH POWER LASERS; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PULSED LASER DEPOSITION; SEMICONDUCTING SILICON; SURFACE ROUGHNESS; WEAR RESISTANCE;

HIGH QUALITY FILMS; HYBRID PROCESS; MICROFABRICATION;

TITANIUM CARBIDE;

EID: 0037670802 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-003-2138-0 Document Type: Article

Times cited : (6)

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