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Ultramicroscopy

Volumn 102, Issue 2, 2005, Pages 161-171

Characteristics of fracture during the approach process and wear mechanism of a silicon AFM tip

(3) Chung, Koo Hyun a Lee, Yong Ha a Kim, Dae Eun a

a Yonsei University (South Korea)

Author keywords

Atomic force microscope (AFM); High resolution transmission electron microscope (HRTEM); Nano wear; Silicon oxidation

Indexed keywords

ATOMIC FORCE MICROSCOPES (AFM); SILICON TIP WEAR; WEAR MECHANISMS; WEAR RATES;

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; FRACTURE; OXIDATION; SILICON; TRANSMISSION ELECTRON MICROSCOPY; WEAR OF MATERIALS;

MICROSCOPES;

NITROGEN; OXIDE; SILICON; SILICON DIOXIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; DESTRUCTION; MECHANICAL STRESS; OXIDATION; STATISTICAL SIGNIFICANCE; STRUCTURE ANALYSIS;

MICROSCOPY, ATOMIC FORCE; MICROSCOPY, ELECTRON, TRANSMISSION; SILICON; STRESS, MECHANICAL; SURFACE PROPERTIES;

EID: 10044257453 PISSN: 03043991 EISSN: None Source Type: Journal
DOI: 10.1016/j.ultramic.2004.09.009 Document Type: Article

Times cited : (122)

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