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Volumn , Issue , 2001, Pages 81-90

Reliability of a MEMS torsional ratcheting actuator

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CALIBRATION; DAMPING; EQUATIONS OF MOTION; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; STRESS ANALYSIS; TORSIONAL STRESS;

EID: 0035010015     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (24)

References (16)
  • 2
    • 0004954241 scopus 로고    scopus 로고


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.