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Volumn , Issue , 2001, Pages 81-90
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Reliability of a MEMS torsional ratcheting actuator
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CALCULATIONS;
CALIBRATION;
DAMPING;
EQUATIONS OF MOTION;
MICROACTUATORS;
MICROELECTROMECHANICAL DEVICES;
STRESS ANALYSIS;
TORSIONAL STRESS;
MOMENT OF INERTIA;
RATCHETING FREQUENCY;
TORSIONAL RATCHETING ACTUATOR;
RELIABILITY;
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EID: 0035010015
PISSN: 00999512
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (24)
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References (16)
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