Analysis of failure sources in surface-micromachined MEMS

IEEE International Test Conference (TC)

Volumn , Issue , 2000, Pages 739-749

  Deb, N ^a   Blanton, R D ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRONIC EQUIPMENT TESTING; FAILURE ANALYSIS; MICROMACHINING; NATURAL FREQUENCIES; RESONATORS;

ETCH VARIATION; FOREIGN PARTICLES; SURFACE MICROMACHINED RESONATOR; VERTICAL STICTION;

MICROELECTROMECHANICAL DEVICES;

EID: 0034479482     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)