Friction and wear study of the hemispherical rotor bushing in a variable capacitance micromotor

Microsystem Technologies

Volumn 12, Issue 4, 2006, Pages 283-292

  Zhang, Wen Ming ^a   Meng, Guang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; FINITE ELEMENT METHOD; FRICTION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; WEAR OF MATERIALS;

CAPACITANCE MICROMOTOR; GEOMETRY PARAMETERS;

ROTORS;

EID: 33644513446     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0064-0     Document Type: Article

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