Tribological and wear studies of coatings fabricated by atomic layer deposition and by successive ionic layer adsorption and reaction for microelectromechanical devices

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 836-840

  Nistorica, Corina ^a   Liu, Jun Fu ^a   Gory, Igor ^a   Skidmore, George D ^a   Mantiziba, Fadziso M ^b   Gnade, Bruce E ^b   Kim, Jiyoung ^c  

^a ZYVEX CORPORATION   (United States)

^b The University of Texas at Dallas   (United States)

^c Kookmin University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CONFORMAL COATINGS; FRICTION COEFFICIENT; SILICON TEST MICROSTRUCTURE;

COATINGS; ETCHING; FRICTION; MICROSTRUCTURE; SILICON; TRIBOLOGY; WEAR OF MATERIALS;

MICROELECTROMECHANICAL DEVICES;

EID: 31044447085     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1885022     Document Type: Conference Paper

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