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Volumn 6, Issue 6, 2007, Pages 659-665

Coupled mechanical and 3D Monte Carlo simulation of silicon nano wire MOSFETs

Author keywords

Monte Carlo simulation; Nanowire MOSFET; Quantum effects; Strained silicon

Indexed keywords

EMPIRICAL PSEUDO-POTENTIAL METHOD; MONTE CARLO TRANSPORT MODEL; NANOWIRE MOSFET; QUANTUM EFFECTS; STRAINED SILICON;

EID: 36349024439     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2007.908491     Document Type: Article
Times cited : (23)

References (42)
  • 1
    • 84858467892 scopus 로고    scopus 로고
    • International technology roadmap for semiconductors
    • "International technology roadmap for semiconductors," http://public.itrs.net.
  • 5
    • 33750497101 scopus 로고    scopus 로고
    • Self-consistent modeling of longitudinal quantum effects in nanoscale double-gate metal oxide semiconductor field effect transistors
    • F. O. Heinz and A. Schenk, "Self-consistent modeling of longitudinal quantum effects in nanoscale double-gate metal oxide semiconductor field effect transistors," Journal of Applied Physics, vol. 100, no. 8, p. 084314, 2006.
    • (2006) Journal of Applied Physics , vol.100 , Issue.8 , pp. 084314
    • Heinz, F.O.1    Schenk, A.2
  • 6
    • 2842549616 scopus 로고
    • The quantum transmitting boundary method
    • C. Lent and D. Kirkner, "The quantum transmitting boundary method," Journal of Applied Physics, vol. 67, no. 10, pp. 6353-6359, 1990.
    • (1990) Journal of Applied Physics , vol.67 , Issue.10 , pp. 6353-6359
    • Lent, C.1    Kirkner, D.2
  • 7
    • 0012258244 scopus 로고    scopus 로고
    • Ballistic FET Modeling Using QDAME: Quantum Device Analysis by Modal Evaluation
    • S. Laux, A. Kumar, and M. Fischetti, "Ballistic FET Modeling Using QDAME: Quantum Device Analysis by Modal Evaluation," IEEE Trans. on Nanotechnology, vol. 1, no. 4, pp. 255-259, 2002.
    • (2002) IEEE Trans. on Nanotechnology , vol.1 , Issue.4 , pp. 255-259
    • Laux, S.1    Kumar, A.2    Fischetti, M.3
  • 8
    • 21644457397 scopus 로고    scopus 로고
    • Exploring the limit of strain-induced performance gain in p-and n-SSDOI-MOSFETs
    • F. Bufler, "Exploring the limit of strain-induced performance gain in p-and n-SSDOI-MOSFETs," in IEDM Technical Digest, 2004, pp. 601-604.
    • (2004) IEDM Technical Digest , pp. 601-604
    • Bufler, F.1
  • 9
    • 27844528513 scopus 로고    scopus 로고
    • Phonon-assisted ballistic to diffusive crossover in silicon nanowire transistors
    • M. Gilbert, R. Akis, and D. Ferry, "Phonon-assisted ballistic to diffusive crossover in silicon nanowire transistors," Journal of Applied Physics, vol. 98, no. 9, p. 094303, 2005.
    • (2005) Journal of Applied Physics , vol.98 , Issue.9 , pp. 094303
    • Gilbert, M.1    Akis, R.2    Ferry, D.3
  • 10
    • 0002899780 scopus 로고    scopus 로고
    • Multi-dimensional quantum effect simulation using a density-gradient model and script-level programming techniques
    • C. Rafferty, B. Biegel, M. Ancona, J. Bude, and R. Dutton, "Multi-dimensional quantum effect simulation using a density-gradient model and script-level programming techniques," in Proc. SISPAD Conference, 1998, pp. 137-140.
    • (1998) Proc. SISPAD Conference , pp. 137-140
    • Rafferty, C.1    Biegel, B.2    Ancona, M.3    Bude, J.4    Dutton, R.5
  • 11
    • 0032098559 scopus 로고    scopus 로고
    • Self-Consistent 2-D Model for Quantum Effects in n-MOS Transistors
    • A. S. Spinelli, A. Benvenuti, and A. Pacelli, "Self-Consistent 2-D Model for Quantum Effects in n-MOS Transistors," IEEE Trans. on Electron Devices, vol. 45, no. 6, pp. 1342-1349, 1998.
    • (1998) IEEE Trans. on Electron Devices , vol.45 , Issue.6 , pp. 1342-1349
    • Spinelli, A.S.1    Benvenuti, A.2    Pacelli, A.3
  • 13
    • 35949025517 scopus 로고
    • The Monte Carlo method for the solution of charge transport in semiconductors with applications to covalent materials
    • C. Jacoboni and L. Reggiani, "The Monte Carlo method for the solution of charge transport in semiconductors with applications to covalent materials," Rev. Mod. Phys., vol. 55, pp. 645-705, 1983.
    • (1983) Rev. Mod. Phys , vol.55 , pp. 645-705
    • Jacoboni, C.1    Reggiani, L.2
  • 14
    • 0038056340 scopus 로고    scopus 로고
    • A Quantum Correction Based on Schrödinger Equation Applied to Monte Carlo Device Simulation
    • B. Winstead and U. Ravaioli, "A Quantum Correction Based on Schrödinger Equation Applied to Monte Carlo Device Simulation," IEEE Trans. on Electron Devices, vol. 50, no. 2, pp. 440-446, 2003.
    • (2003) IEEE Trans. on Electron Devices , vol.50 , Issue.2 , pp. 440-446
    • Winstead, B.1    Ravaioli, U.2
  • 15
    • 0034453530 scopus 로고    scopus 로고
    • Quantum Effects in MOSFETs: Use of an Effective Potential in 3D Monte Carlo Simulation of Ultra-Short Channel Devices
    • D. Ferry, R. Akis, and D. Vasileska, "Quantum Effects in MOSFETs: Use of an Effective Potential in 3D Monte Carlo Simulation of Ultra-Short Channel Devices," in IEDM Technical Digest, 2000, pp. 287-290.
    • (2000) IEDM Technical Digest , pp. 287-290
    • Ferry, D.1    Akis, R.2    Vasileska, D.3
  • 17
    • 4243227379 scopus 로고
    • Monte Carlo study of electron transport in silicon inversion layer
    • M. Fischetti and S. Laux, "Monte Carlo study of electron transport in silicon inversion layer," Phys. Rev. B, vol. 48, no. 4, pp. 2244-2274, 1993.
    • (1993) Phys. Rev. B , vol.48 , Issue.4 , pp. 2244-2274
    • Fischetti, M.1    Laux, S.2
  • 18
    • 33644985373 scopus 로고    scopus 로고
    • Multi sub-band Monte Carlo simulation of an ultra-thin double gate MOSFET with 2D electron gas
    • J. Saint-Martin, A. Bournel, F. Monsef, C. Chassat, and P. Dollfus, "Multi sub-band Monte Carlo simulation of an ultra-thin double gate MOSFET with 2D electron gas," Semicond Sci. Technol., vol. 21, pp. L29-L31, 2006.
    • (2006) Semicond Sci. Technol , vol.21
    • Saint-Martin, J.1    Bournel, A.2    Monsef, F.3    Chassat, C.4    Dollfus, P.5
  • 20
    • 84943199928 scopus 로고    scopus 로고
    • Assessment of the Impact of Biaxial Strain on the Drain Current of Decananometric n-MOSFET
    • D. Ponton, L. Lucci, P. Palestri, D. Esseni, and L. Selmi, "Assessment of the Impact of Biaxial Strain on the Drain Current of Decananometric n-MOSFET," in Proc. ESSDERC Conf., 2006, pp. 166-169.
    • (2006) Proc. ESSDERC Conf , pp. 166-169
    • Ponton, D.1    Lucci, L.2    Palestri, P.3    Esseni, D.4    Selmi, L.5
  • 21
    • 42549119553 scopus 로고    scopus 로고
    • 3D Monte Carlo Device Simulation of NanoWire MOSFETs including Quantum Mechanical and Strain Effects
    • A. Ghetti and D. Rideau, "3D Monte Carlo Device Simulation of NanoWire MOSFETs including Quantum Mechanical and Strain Effects," in Proc. SISPAD Conference, 2006, pp. 67-70.
    • (2006) Proc. SISPAD Conference , pp. 67-70
    • Ghetti, A.1    Rideau, D.2
  • 22
    • 33744685518 scopus 로고
    • Nonlocal Pseudopotential Calculations for the Electronic Structure of Eleven Diamond and Zinc-Blend Semiconductors
    • J.R.Chelikowsky and M.L.Cohen, "Nonlocal Pseudopotential Calculations for the Electronic Structure of Eleven Diamond and Zinc-Blend Semiconductors," Phys. Rev. B, vol. 14, p. 556, 1976.
    • (1976) Phys. Rev. B , vol.14 , pp. 556
    • Chelikowsky, J.R.1    Cohen, M.L.2
  • 24
    • 33846953816 scopus 로고    scopus 로고
    • A full self-consistent methodology for strain-induced effects characterization in silicon devices
    • P. Fantini, A. Ghetti, G. Carnevale, E. Bonera, and D. Rideau, "A full self-consistent methodology for strain-induced effects characterization in silicon devices," in IEDM Technical Digest, 2005, pp. 1013-1016.
    • (2005) IEDM Technical Digest , pp. 1013-1016
    • Fantini, P.1    Ghetti, A.2    Carnevale, G.3    Bonera, E.4    Rideau, D.5
  • 25
    • 0031693941 scopus 로고    scopus 로고
    • Theory of electron transport in small semiconductor devices using the Pauli master equation
    • M. Fischetti, "Theory of electron transport in small semiconductor devices using the Pauli master equation," Journal of Applied Physics, vol. 83, no. 1, pp. 270-291, 1998.
    • (1998) Journal of Applied Physics , vol.83 , Issue.1 , pp. 270-291
    • Fischetti, M.1
  • 26
    • 0036541428 scopus 로고    scopus 로고
    • Simulation of Quantum Effects Along the Channel of Ultrascaled Si-Based MOSFETs
    • W. Chen, L. Register, and S. Banerjee, "Simulation of Quantum Effects Along the Channel of Ultrascaled Si-Based MOSFETs," IEEE Trans. on Electron Devices, vol. 49, no. 4, pp. 652-657, 2002.
    • (2002) IEEE Trans. on Electron Devices , vol.49 , Issue.4 , pp. 652-657
    • Chen, W.1    Register, L.2    Banerjee, S.3
  • 27
    • 84957871180 scopus 로고    scopus 로고
    • Monte-Carlo Simulation of Decananometric Double-Gate SOI devices: Multi-Subband vs. 3D-Electron Gas with Quantum Correction
    • I. Riolino, M. Braccioli, L. Lucci, D. Esseni, C. Fiegna, P. Palestri, and L. Selmi, "Monte-Carlo Simulation of Decananometric Double-Gate SOI devices: Multi-Subband vs. 3D-Electron Gas with Quantum Correction," in Proc. ESSDERC Conf, 2006, pp. 162-165.
    • (2006) Proc. ESSDERC Conf , pp. 162-165
    • Riolino, I.1    Braccioli, M.2    Lucci, L.3    Esseni, D.4    Fiegna, C.5    Palestri, P.6    Selmi, L.7
  • 28
    • 0034297792 scopus 로고    scopus 로고
    • Viscoelastic Material Behavior: Models and Siscretization Used in Process Simulator DIOS
    • A. Pomp, S. Zelenka, N. Strecker, and W. Fichtner, "Viscoelastic Material Behavior: Models and Siscretization Used in Process Simulator DIOS," IEEE Trans. on Electron Devices, vol. 47, no. 10, pp. 1999-2007, 2000.
    • (2000) IEEE Trans. on Electron Devices , vol.47 , Issue.10 , pp. 1999-2007
    • Pomp, A.1    Zelenka, S.2    Strecker, N.3    Fichtner, W.4
  • 29
    • 0023855615 scopus 로고
    • Two-Dimensional Thermal Oxidation of Silicon-II. Modeling Stress Effects in Wet Oxides
    • D.-B. Kao, J. McVittie, W. Nix, and K. Saraswat, "Two-Dimensional Thermal Oxidation of Silicon-II. Modeling Stress Effects in Wet Oxides," IEEE Trans. on Electron Devices, vol. 35, no. 1, pp. 25-37, 1988.
    • (1988) IEEE Trans. on Electron Devices , vol.35 , Issue.1 , pp. 25-37
    • Kao, D.-B.1    McVittie, J.2    Nix, W.3    Saraswat, K.4
  • 30
    • 33747338402 scopus 로고    scopus 로고
    • Raman stress maps from finite-element models of silicon structures
    • E. Bonera, M. Fanciulli, and G. Carnevale, "Raman stress maps from finite-element models of silicon structures," Journal of Applied Physics, vol. 100, no. 3, p. 033516, 2006.
    • (2006) Journal of Applied Physics , vol.100 , Issue.3 , pp. 033516
    • Bonera, E.1    Fanciulli, M.2    Carnevale, G.3
  • 31
    • 0028430092 scopus 로고
    • Phase-Space Simplex Monte Carlo for Semiconductor Transport
    • J. Bude and R. Smith, "Phase-Space Simplex Monte Carlo for Semiconductor Transport," Semicond.Sci.Technol., vol. 9, p. 840, 1994.
    • (1994) Semicond.Sci.Technol , vol.9 , pp. 840
    • Bude, J.1    Smith, R.2
  • 32
    • 0001038893 scopus 로고    scopus 로고
    • Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys
    • M. Fischetti and S. Laux, "Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys," Journal of Applied Physics, vol. 80, no. 4, pp. 2234-2252, 1996.
    • (1996) Journal of Applied Physics , vol.80 , Issue.4 , pp. 2234-2252
    • Fischetti, M.1    Laux, S.2
  • 33
    • 0000363279 scopus 로고    scopus 로고
    • Subband structure and mobility of two-dimentsional holes in strained Si/SiGe MOSFET's
    • R. Oberhuber, G. Zandler, and P. Vogl, "Subband structure and mobility of two-dimentsional holes in strained Si/SiGe MOSFET's," Phys. Rev. B, vol. 58, no. 15, pp. 9941-9948, 1998.
    • (1998) Phys. Rev. B , vol.58 , Issue.15 , pp. 9941-9948
    • Oberhuber, R.1    Zandler, G.2    Vogl, P.3
  • 34
    • 0036932386 scopus 로고    scopus 로고
    • A Study of Subband Structure and Transport of Two-Dimensional Holes in Strained Si p-MOSFETs Using Full-Band Modelling
    • H. Nakatsuji, Y. Kamakura, and K. Taniguchi, "A Study of Subband Structure and Transport of Two-Dimensional Holes in Strained Si p-MOSFETs Using Full-Band Modelling," in IEDM Technical Digest, 2002, pp. 727-730.
    • (2002) IEDM Technical Digest , pp. 727-730
    • Nakatsuji, H.1    Kamakura, Y.2    Taniguchi, K.3
  • 36
    • 0026817615 scopus 로고
    • A Semi-Empirical Model of Surface Scattering for Monte Carlo Simulation of Silicon n-MOSFET's
    • E. Sangiorgi and M. Pinto, "A Semi-Empirical Model of Surface Scattering for Monte Carlo Simulation of Silicon n-MOSFET's," IEEE Trans. on Electron Devices, vol. 39, no. 2, pp. 356-361, 1992.
    • (1992) IEEE Trans. on Electron Devices , vol.39 , Issue.2 , pp. 356-361
    • Sangiorgi, E.1    Pinto, M.2
  • 37
    • 85032069152 scopus 로고
    • Electronic properties of two-dimensional systems
    • T. Ando, A. Fowler, and F. Stern, "Electronic properties of two-dimensional systems," Rev. Mod. Phys., vol. 54, no. 2, pp. 437-672, 1982.
    • (1982) Rev. Mod. Phys , vol.54 , Issue.2 , pp. 437-672
    • Ando, T.1    Fowler, A.2    Stern, F.3
  • 38
    • 42549148017 scopus 로고    scopus 로고
    • Low-Field Strained Silicon Mobility 'full-band' Monte Carlo Simulation using k.p and EPM Bandstructure
    • M. Feraille, D. Rideau, A. Ghetti, A. Poncet, C. Tavernier, and H. Jaouen, "Low-Field Strained Silicon Mobility 'full-band' Monte Carlo Simulation using k.p and EPM Bandstructure," in Proc. SISPAD Conference, 2006, pp. 264-266.
    • (2006) Proc. SISPAD Conference , pp. 264-266
    • Feraille, M.1    Rideau, D.2    Ghetti, A.3    Poncet, A.4    Tavernier, C.5    Jaouen, H.6
  • 39
    • 4344606224 scopus 로고    scopus 로고
    • A three-dimensional quantum simulation of silicon nanowire transistors with the effective-mass approxiamtion
    • J. Wang, E. Polizzi, and M. Lundstrom, "A three-dimensional quantum simulation of silicon nanowire transistors with the effective-mass approxiamtion," Journal of Applied Physics, vol. 96, no. 4, pp. 2192-2203, 2004.
    • (2004) Journal of Applied Physics , vol.96 , Issue.4 , pp. 2192-2203
    • Wang, J.1    Polizzi, E.2    Lundstrom, M.3
  • 40
    • 0034294265 scopus 로고    scopus 로고
    • Two-Dimensional Quantum Mechanical Simulation of Charge Distribution in Silicon MOSFETs
    • A. Abramo, A. Cardin, L. Selmi, and E. Sangiorgi, "Two-Dimensional Quantum Mechanical Simulation of Charge Distribution in Silicon MOSFETs," IEEE Trans. on Electron Devices, vol. 47, no. 10, pp. 1858-1863, 2000.
    • (2000) IEEE Trans. on Electron Devices , vol.47 , Issue.10 , pp. 1858-1863
    • Abramo, A.1    Cardin, A.2    Selmi, L.3    Sangiorgi, E.4
  • 42
    • 20744449792 scopus 로고    scopus 로고
    • M. Frigo and S. G. Johnson, The design and implementation of FFTW3, Proceedings of the IEEE, 93, no. 2, pp. 216-231, 2005, special issue on Program Generation, Optimization, and Platform Adaptation.
    • M. Frigo and S. G. Johnson, "The design and implementation of FFTW3," Proceedings of the IEEE, vol. 93, no. 2, pp. 216-231, 2005, special issue on "Program Generation, Optimization, and Platform Adaptation".


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