Review of cathodic arc deposition for preparing droplet-free thin films

IEEE Transactions on Plasma Science

Volumn 35, Issue 4 II, 2007, Pages 992-999

  Takikawa, Hirofumi ^a   Tanoue, Hideto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Cathodic arc; Droplet suppression; Filtered arc; Macrodroplet; Thin film deposition

Indexed keywords

CATHODES; CATHODIC PROTECTION; IONS; PLASMA DEPOSITION; PROTECTIVE COATINGS;

CATHODIC ARC DEPOSITION; CATHODIC ARC PLASMA; DROPLET-FREE THIN FILMS; FILTERED ARC; MACRODROPLETS; THIN FILM DEPOSITION;

THIN FILMS;

EID: 34548312491     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2007.897907     Document Type: Conference Paper

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