Macroparticles in films deposited by steered cathodic arc

Journal of Physics D: Applied Physics

Volumn 29, Issue 7, 1996, Pages 2025-2031

  Swift, P D ^a,b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTED DISCHARGE ARC; MACROPARTICLES; STEERED ARC EVAPORATION; STEERED VACUUM CATHODIC ARC; TITANIUM FILMS;

CATHODES; CHARGED PARTICLES; DEPOSITION; ELECTRIC ARCS; ELECTRON EMISSION; EVAPORATION; GLOW DISCHARGES; MAGNETIC FIELDS; MATHEMATICAL MODELS; PLASMAS; TITANIUM;

METALLIC FILMS;

EID: 0030194123     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/7/041     Document Type: Article

References (46)

1. Plyutto A A, Ryzhkov U N and Kapin A T 1965 Sov. Phys.-JETP 20 328
2. Davis W D and Miller H C 1969 J. Appl. Phys. 40 2212
3. Boelens S and Veltrop H 1987 Surf. Coat. Technol. 33 63
4. Utsumi T and English J H 1975 J. Appl. Phys. 46 126
5. Daadler J E 1976 J. Phys. D: Appl. Phys. 9 2379
6. Tuma D T, Chen C L and Davies D K 1978 J. Appl. Phys. 49 3821
7. Anders S, Anders A, Yu K M, Yao X Y and Brown I G 1993 IEEE Trans. Plasma Sci. 21 440
8. Vasin A I, Dorodnov A M and Petrosov V A 1979 Sov. Tech. Phys. Lett. 5 635
9. St John R M and Winans J G 1954 Phys. Rev. 94 1097
10. Carter R P and Murphree D L 1973 J. Appl. Phys. 44 5190
11. Swift P D, McKenzie D R, Falconer I S and Martin P J 1989 J. Appl. Phys. 66 505
12. Smith C G 1942 Phys. Rev. 62 48
13. Robson A E 1978 J. Phys. D: Appl. Phys. 11 1917
14. Smith C G 1946 Phys. Rev. 69 96
15. Swift P D 1990 J. Appl. Phys. 67 1720
16. Randhawa H and Johnson P C 1987 Surf. Coat. Technol. 31 303
17. Randhawa H and Johnson P C 1987 Surf. Coat. Technol. 33 53
18. Randhawa H 1988 Surf. Coat. Technol. 36 829
19. Randhawa H 1988 Thin Solid Films 167 175
20. Ramalingam S, Qi C B and Kim K 1987 US Patent 4,673,477
21. Sanders D M 1989 J. Vac. Sci. Technol. A 7 2339
22. Aksenov I I, Belous V A, Padalka V G and Khoroshikh V M 1978 Inst. Exp. Tech. 21 1416
23. Aksenov I I, Belous V A, Padalka V G and Khoroshikh V M 1978 Sov. J. Plasma Phys. 4 425
24. Sanders D M and Pyle E A 1987 J. Vac. Sci. Technol. A 5 2728
25. Randhawa H 1989 J. Vac. Sci. Technol. A 7 2346
26. Storer J, Galvin J E and Brown I G 1989 J. Appl. Phys. 66 5245
27. Dorodnov A M, Muboyadzhan S A, Pomelov Ya A and Strukov Yu A 1981 J. Appl. Mech. Tech. Phys. 22 28
28. Sanders DM 1988 J. Vac. Sci. Technol. A 6 1929
29. McClure G W 1974 J. Appl. Phys. 45 2078
30. Hantzsche E, Jüttner B, Puchkarov V F, Rohrbeck W and Wolff H 1970 J. Phys. D: Appl. Phys. 9 1771
31. Hantzsche E 1977 Beitr. Plasmaphys. 17 65
32. Daalder J E 1978 J. Phys. D: Appl. Phys. 11 1667
33. Jüttner B 1979 Beitr. Plasmaphys. 19 25
34. Guile A E and Jüttner B 1980 IEEE Trans. Plasma Sci. 8 259
35. Jüttner B 1981 J. Phys. D: Appl. Phys. 14 1265
36. Jüttner B 1981 Beitr. Plasmaphys. 21 217
37. Guile A E 1980 IEE Proc. A 127 452
38. Daadler J E 1974 IEEE Trans. Power Appl. Syst. 93 1747
39. Daadler J E 1983 J. Phys. D: Appl. Phys. 16 17
40. Hantzsche E, Jüttner B and Pursch H 1983 J. Phys. D: Appl. Phys. 16 L175
41. Ertürk E, Heuval H S and Dederichs H G 1989 Surf. Coat. Technol. 39/40 455
42. Johnson P C 1989 Physics of Thin Films ed M H Francombe and J L Vosson (Boston: Academic)
43. Vyskocill J and Musil J 1990 Surf. Coat. Technol. 43/44 299
44. Ives M, Brooks J S, Crawley J and Burgmer W 1990 Surf. Coat. Technol. 43/44 299
45. Sanders D M, Boercker D B and Falabella S 1990 IEEE Trans. Plasma Sci. 18 883
46. Boxman R L and Goldsmith S 1992 Surf. Coat. Technol. 52 39