A rectilinear plasma filtering system for vacuum-arc deposition of diamond-like carbon coatings

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 468-471

  Aksenov, I I ^a   Belous, V A ^a   Vasil'Ev, V V ^a   Volkov, Yu Ya ^a   Strel'nitskij, V E ^a  

^a KHARKOV INSTITUTE OF PHYSICS AND TECHNOLOGY   (Ukraine)

Author keywords

Diamond like coatings; Plasma filtering; Vacuum arc deposition

Indexed keywords

CARBON; CATHODES; DEPOSITION; ELECTRIC ARCS; PLASMA SOURCES; VACUUM TECHNOLOGY;

DIAMOND-LIKE COATINGS; PLASMA FILTERING; VACUUM ARC DEPOSITION;

PROTECTIVE COATINGS;

EID: 0032607394     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00402-6     Document Type: Article

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