DLC thin film preparation by cathodic arc deposition with a super droplet-free system

Surface and Coatings Technology

Volumn 163-164, Issue , 2003, Pages 368-373

  Takikawa, Hirofumi ^a   Izumi, Kikuko ^a   Miyano, Ryuichi ^a   Sakakibara, Tateki ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Diamond like carbon film; Macrodroplets; Magnetically filtered arc deposition; T shape duct

Indexed keywords

CATHODES; DEPOSITION; GRAPHITE; OPTICAL MICROSCOPY;

CATHODIC ARC DEPOSITION;

DIAMOND LIKE CARBON FILMS;

DEPOSITION; DIAMOND-LIKE CARBON; INORGANIC COATING;

EID: 0037472621     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00629-1     Document Type: Article

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