High current filtered arc deposition for ultra thin carbon overcoats on magnetic hard disks and read-write heads

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 648-650

  Petereit, B ^a   Siemroth, P ^b   Schneider, H H ^a   Hilgers, H ^a  

^a IBM   (Germany)

^b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Corrosion protection; Diamond like carbon; Filtered cathodic arc; High current arc; Storage devices; Ultra thin films

Indexed keywords

CARBON; HARD DISK STORAGE; MAGNETRON SPUTTERING; PROTECTIVE COATINGS; THICKNESS MEASUREMENT;

ARC DEPOSITIONS;

MAGNETIC HEADS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 18144436740     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00579-6     Document Type: Article

References (5)

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