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Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 684-690

A new generation of filtered arc sources for ultrathin top coats on magnetic hard disks

(5) Siemroth, P a Berthold, J b Petereit, B c Schneider, H H a Hilgers, H d

a Arc Precision GmbH (Germany)

b FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS (Germany)

c Naomi Technologies (Germany)

d IBM (Germany)

Author keywords

HCA; Hard disk; PVD

Indexed keywords

ARRAYS; CARBON; COATINGS; CORROSION; DEPOSITION; MAGNETIC FIELD EFFECTS; MICROELECTRONICS; PHYSICAL VAPOR DEPOSITION; THIN FILMS;

DISK PRODUCTION EFFICIENCY; MAGNETIC FIELD ARRAYS; MAGNETIC LAYERS; ULTRATHIN TOP COATINGS;

HARD DISK STORAGE;

COATING;

EID: 14644394304 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.07.004 Document Type: Article

Times cited : (15)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.