The filtered arc process and materials deposition

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 7-10

  Martin, P J ^a   Bendavid, A ^a  

^a CSIRO   (Australia)

Author keywords

AlSiN; Filtered cathodic arc deposition; Hard coatings; Nanocomposites; NbN; NbN Ni; TiAiSiNxNbC

Indexed keywords

ALUMINUM; CATHODES; DEPOSITION; INDENTATION; NANOSTRUCTURED MATERIALS; REFRACTIVE INDEX; SILICA; SYNTHESIS (CHEMICAL);

FILTERED ARC PROCESSES;

COATINGS;

CATHODIC ARC PLASMA DEPOSITION; COATING; COMPOSITE; HARDNESS; NITRIDING;

EID: 0035387586     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01135-5     Document Type: Article

References (23)