Physical-chemical hybrid deposition of DLC film on rubber by T-shape filtered-arc-deposition

Vacuum

Volumn 73, Issue 3-4, 2004, Pages 611-617

  Miyakawa, Nobuhide ^a   Minamisawa, Shinji ^a   Takikawa, Hirofumi ^a   Sakakibara, Tateki ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

CVD; Deposition rate; Diamond like carbon (DLC) film; Morphology; PVD; Rubber substrates; T shape filtered arc deposition (T FAD)

Indexed keywords

ACETYLENE; CATHODES; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; PHYSICAL VAPOR DEPOSITION; PLASMA APPLICATIONS; RUBBER; VACUUM APPLICATIONS;

DEPOSITION RATE; RUBBER SUBSTRATES; T-SHAPE FILTERED ARC DEPOSITION (T-FAD);

DIAMOND LIKE CARBON FILMS;

EID: 1842529969     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.079     Document Type: Conference Paper

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