Diamond-like carbon: State of the art

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 428-434

  Grill, Alfred ^a  

^a IBM RESEARCH   (United States)

Author keywords

Applications; Deposition; Diamond like carbon; Properties

Indexed keywords

AMORPHOUS FILMS; DEPOSITION; ELECTRIC PROPERTIES; FILM PREPARATION; FLUORINE; HYDROGENATION; NITROGEN; OPTICAL PROPERTIES; SILICON; TRIBOLOGY;

DIAMOND-LIKE CARBON FILMS;

DIAMOND FILMS;

EID: 0032614255     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00262-3     Document Type: Review

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