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Surface and Coatings Technology

Volumn 200, Issue 7, 2005, Pages 2228-2235

Nanocomposite Ti-Si-N, Zr-Si-N, Ti-Al-Si-N, Ti-Al-V-Si-N thin film coatings deposited by vacuum arc deposition

(4) Martin, P J a Bendavid, A a Cairney, J M b Hoffman, M b

a CSIRO (Australia)

b UNIVERSITY OF NEW SOUTH WALES (Australia)

Author keywords

Cathodic arc deposition; Hardness; Nanocomposite coatings; Ti Al Si N; Ti Al V Si N; Ti Si N; TiN; XPS; Zr Si N

Indexed keywords

COMPOSITION EFFECTS; EVAPORATION; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; HARDNESS; NANOSTRUCTURED MATERIALS; SILICON; SYNTHESIS (CHEMICAL); THIN FILMS; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; VACUUM DEPOSITED COATINGS;

CATHODIC ARC DEPOSITION; NANOCOMPOSITE COATINGS; TETRAMETHYLSILANE;

INORGANIC COATINGS;

COMPOSITE;

EID: 29244447078 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.06.012 Document Type: Article

Times cited : (120)

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