Energetic deposition using filtered cathodic arc plasmas

Vacuum

Volumn 67, Issue 3-4, 2002, Pages 673-686

  Anders, André ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Adhesion; Atomic scale heating; Energetic deposition; Film stress; Filtered cathodic arc; Metal plasma immersion ion implantation and deposition (MePIIID); Review; Subplantation

Indexed keywords

ADHESION; CATHODES; COMPRESSIVE STRESS; DEPOSITION; ELASTIC MODULI; ELECTRIC ARCS; ION IMPLANTATION; KINETIC ENERGY; PLASMA APPLICATIONS; STRESS ANALYSIS; SURFACE ROUGHNESS;

CATHODIC ARC PLASMAS;

THIN FILMS;

EID: 0037179737     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00260-9     Document Type: Conference Paper

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