Preparation of diamond-like carbon thin films by shielded arc ion plating

Journal of Materials Science Letters

Volumn 16, Issue 7, 1997, Pages 553-556

  Taki, Y ^a   Kitagawa, T ^a   Takai, O ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FILM PREPARATION; HARDNESS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SYNTHESIS (CHEMICAL); THIN FILMS;

SHIELDED ARC ION PLATING (SAIP);

DIAMOND FILMS;

EID: 0031117498     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018513804905     Document Type: Article

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