Measuring the thin film elastic modulus with a magnetostrictive sensor

Journal of Micromechanics and Microengineering

Volumn 17, Issue 4, 2007, Pages 709-716

  Liang, C ^a   Prorok, B C ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ERROR ANALYSIS; FILM THICKNESS; MAGNETOSTRICTIVE DEVICES; SENSORS; THIN FILMS;

FREQUENCY SHIFT; MAGNETOSTRICTIVE SENSORS; ROOM TEMPERATURE;

ELASTIC MODULI;

EID: 34248999480     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/4/006     Document Type: Conference Paper

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