Evaluation of Young modulus of CVD coatings by different techniques

Thin Solid Films

Volumn 469-470, Issue SPEC. ISS., 2004, Pages 214-220

  Bellan, C ^a   Dhers, J ^a  

^a CEA Marcoule   (France)

Author keywords

Acoustic microscopy; CVD; Nanoindentation; Young modulus

Indexed keywords

ACOUSTIC MICROSCOPES; CHEMICAL VAPOR DEPOSITION; CONTAMINATION; COOLANTS; ELASTIC MODULI; FLUIDIZED BEDS; GAS COOLED REACTORS; INDENTATION; NUCLEAR FUELS; PYROLYSIS; SILICON CARBIDE; THIN FILMS;

GAS COOLANTS; NANOINDENTATION; PYROLYTIC CARBON;

COATINGS;

EID: 10044243645     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.08.182     Document Type: Article

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