Measurement of mechanical properties in small dimensions by microbeam deflection

Materials Research Society Symposium - Proceedings

Volumn 518, Issue , 1998, Pages 39-44

  Kraft, O ^a   Schwaiger, R ^a   Nix, W D ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELASTICITY; ETCHING; FRACTURE TOUGHNESS; ION BEAMS; LITHOGRAPHY; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; MICROELECTROMECHANICAL DEVICES; PLASTIC DEFORMATION; SILVER;

INITIAL LINEAR LOAD DISPLACEMENT BEHAVIOR; MACROSCOPIC BENDING TEST; MICROBEAM DEFLECTION;

THIN FILMS;

EID: 0032299035     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-518-39     Document Type: Conference Paper

References (14)