Modeling of Young's modulus, hardness and stiffness of chromium zigzag multilayers sputter deposited

Thin Solid Films

Volumn 503, Issue 1-2, 2006, Pages 177-189

  Lintymer, J ^a   Martin, N ^a   Chappe J M ^a   Takadoum, J ^a   Delobelle, P ^b  

^a Centre National de la Recherche Scientifique   (France)

^b FEMTO ST INSTITUTE   (France)

Author keywords

Chromium; Hardness; Stiffness; Young's modulus; Zigzag

Indexed keywords

CHROMIUM; ELASTIC MODULI; HARDNESS; MICROSTRUCTURE; SPUTTER DEPOSITION; STIFFNESS; THIN FILMS;

BULK PROPERTIES; NANOINDENTATION; NORMAL FORCE; ZIGZAG;

MULTILAYERS;

EID: 33644760332     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.157     Document Type: Article

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