A comparison of testing methods in assessing the elastic properties of sputter-deposited gold films

Thin Solid Films

Volumn 515, Issue 20-21, 2007, Pages 7911-7918

  Wang, L ^a   Liang, C ^a   Prorok, B C ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

EBSD; Longitudinal vibration; Magnetostrictive strip sensor; Membrane deflection experiment; Young's modulus

Indexed keywords

ELASTIC MODULI; ELASTICITY; FILM THICKNESS; GOLD; MAGNETOSTRICTIVE DEVICES; SENSORS; SPUTTER DEPOSITION;

LONGITUDINAL VIBRATION; MAGNETOSTRICTIVE STRIP SENSORS (MSS); MEMBRANE DEFLECTION EXPERIMENT (MDE);

THICK FILMS;

EID: 34249084403     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.04.022     Document Type: Article

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