Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension

Scripta Materialia

Volumn 47, Issue 12, 2002, Pages 863-867

  Haque, M A ^a   A Saif, M T ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Aluminum; Mechanical properties; MEMS; Thin films

Indexed keywords

ALUMINUM; CREEP; DEFORMATION; DUCTILITY; ELASTIC MODULI; ELASTICITY; GRAIN SIZE AND SHAPE; TENSILE TESTING;

UNIAXIAL TENSION;

THICK FILMS;

EID: 0036887933     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6462(02)00306-8     Document Type: Article

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